Cleaning force in laser cleaning of silicon substrates
10.1117/12.280569
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2014
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sg-nus-scholar.10635-813892023-10-30T08:18:41Z Cleaning force in laser cleaning of silicon substrates Song, W.D. Lu, Y.F. Ye, K.D. Tee, C.K. Hong, M.H. Liu, D.M. Low, T.S. ELECTRICAL ENGINEERING Cleaning force Laser cleaning Silicon substrate Thermal stress 10.1117/12.280569 Proceedings of SPIE - The International Society for Optical Engineering 3184 158-165 PSISD 2014-10-07T03:07:47Z 2014-10-07T03:07:47Z 1997 Conference Paper Song, W.D., Lu, Y.F., Ye, K.D., Tee, C.K., Hong, M.H., Liu, D.M., Low, T.S. (1997). Cleaning force in laser cleaning of silicon substrates. Proceedings of SPIE - The International Society for Optical Engineering 3184 : 158-165. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280569 0277786X http://scholarbank.nus.edu.sg/handle/10635/81389 A1997BJ51B00020 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| topic |
Cleaning force Laser cleaning Silicon substrate Thermal stress |
| spellingShingle |
Cleaning force Laser cleaning Silicon substrate Thermal stress Song, W.D. Lu, Y.F. Ye, K.D. Tee, C.K. Hong, M.H. Liu, D.M. Low, T.S. Cleaning force in laser cleaning of silicon substrates |
| description |
10.1117/12.280569 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Song, W.D. Lu, Y.F. Ye, K.D. Tee, C.K. Hong, M.H. Liu, D.M. Low, T.S. |
| format |
Conference or Workshop Item |
| author |
Song, W.D. Lu, Y.F. Ye, K.D. Tee, C.K. Hong, M.H. Liu, D.M. Low, T.S. |
| author_sort |
Song, W.D. |
| title |
Cleaning force in laser cleaning of silicon substrates |
| title_short |
Cleaning force in laser cleaning of silicon substrates |
| title_full |
Cleaning force in laser cleaning of silicon substrates |
| title_fullStr |
Cleaning force in laser cleaning of silicon substrates |
| title_full_unstemmed |
Cleaning force in laser cleaning of silicon substrates |
| title_sort |
cleaning force in laser cleaning of silicon substrates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81389 |
| _version_ |
1781783985733500928 |