Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing

IECON Proceedings (Industrial Electronics Conference)

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Bibliographic Details
Main Authors:	Lim, K.W., Luo, J., Gu, J., Poh, Y.P., Tan, W.W., Loh, A.P.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81494
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81494
record_format	dspace
spelling	sg-nus-scholar.10635-814942015-01-28T17:55:18Z Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P. ELECTRICAL ENGINEERING IECON Proceedings (Industrial Electronics Conference) 1 6-10 IEPRE 2014-10-07T03:08:54Z 2014-10-07T03:08:54Z 1999 Conference Paper Lim, K.W.,Luo, J.,Gu, J.,Poh, Y.P.,Tan, W.W.,Loh, A.P. (1999). Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing. IECON Proceedings (Industrial Electronics Conference) 1 : 6-10. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81494 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	IECON Proceedings (Industrial Electronics Conference)
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P.
format	Conference or Workshop Item
author	Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P.
spellingShingle	Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P. Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
author_sort	Lim, K.W.
title	Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
title_short	Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
title_full	Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
title_fullStr	Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
title_full_unstemmed	Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
title_sort	integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81494
_version_	1681089081637863424

Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing

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