New spectroscopic photon emission microscope system for semiconductor device analysis

Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA

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Bibliographic Details
Main Authors:	Liu, Y.Y., Tao, J.M., Chan, D.S.H., Phang, J.C.H., Chim, W.K.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81600
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81600
record_format	dspace
spelling	sg-nus-scholar.10635-816002015-01-14T04:30:05Z New spectroscopic photon emission microscope system for semiconductor device analysis Liu, Y.Y. Tao, J.M. Chan, D.S.H. Phang, J.C.H. Chim, W.K. ELECTRICAL ENGINEERING Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA 60-65 234 2014-10-07T03:10:01Z 2014-10-07T03:10:01Z 1995 Conference Paper Liu, Y.Y.,Tao, J.M.,Chan, D.S.H.,Phang, J.C.H.,Chim, W.K. (1995). New spectroscopic photon emission microscope system for semiconductor device analysis. Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA : 60-65. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81600 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Liu, Y.Y. Tao, J.M. Chan, D.S.H. Phang, J.C.H. Chim, W.K.
format	Conference or Workshop Item
author	Liu, Y.Y. Tao, J.M. Chan, D.S.H. Phang, J.C.H. Chim, W.K.
spellingShingle	Liu, Y.Y. Tao, J.M. Chan, D.S.H. Phang, J.C.H. Chim, W.K. New spectroscopic photon emission microscope system for semiconductor device analysis
author_sort	Liu, Y.Y.
title	New spectroscopic photon emission microscope system for semiconductor device analysis
title_short	New spectroscopic photon emission microscope system for semiconductor device analysis
title_full	New spectroscopic photon emission microscope system for semiconductor device analysis
title_fullStr	New spectroscopic photon emission microscope system for semiconductor device analysis
title_full_unstemmed	New spectroscopic photon emission microscope system for semiconductor device analysis
title_sort	new spectroscopic photon emission microscope system for semiconductor device analysis
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81600
_version_	1681089100749209600

New spectroscopic photon emission microscope system for semiconductor device analysis

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