New spectroscopic photon emission microscope system for semiconductor device analysis

• Main Authors: Liu, Y.Y., Tao, J.M., Chan, D.S.H., Phang, J.C.H., Chim, W.K.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/81600
• Institution: National University of Singapore

Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA