Surface analysis of TiN thin film deposited on silicon (100) by excimer laser
Proceedings of SPIE - The International Society for Optical Engineering
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2014
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sg-nus-scholar.10635-817712024-11-10T16:37:22Z Surface analysis of TiN thin film deposited on silicon (100) by excimer laser Wang, H.D. Lu, Y.F. Mai, Z.H. Ren, Z.M. ELECTRICAL ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 3898 232-239 PSISD 2014-10-07T03:11:52Z 2014-10-07T03:11:52Z 1999 Conference Paper Wang, H.D.,Lu, Y.F.,Mai, Z.H.,Ren, Z.M. (1999). Surface analysis of TiN thin film deposited on silicon (100) by excimer laser. Proceedings of SPIE - The International Society for Optical Engineering 3898 : 232-239. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/81771 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Proceedings of SPIE - The International Society for Optical Engineering |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Wang, H.D. Lu, Y.F. Mai, Z.H. Ren, Z.M. |
| format |
Conference or Workshop Item |
| author |
Wang, H.D. Lu, Y.F. Mai, Z.H. Ren, Z.M. |
| spellingShingle |
Wang, H.D. Lu, Y.F. Mai, Z.H. Ren, Z.M. Surface analysis of TiN thin film deposited on silicon (100) by excimer laser |
| author_sort |
Wang, H.D. |
| title |
Surface analysis of TiN thin film deposited on silicon (100) by excimer laser |
| title_short |
Surface analysis of TiN thin film deposited on silicon (100) by excimer laser |
| title_full |
Surface analysis of TiN thin film deposited on silicon (100) by excimer laser |
| title_fullStr |
Surface analysis of TiN thin film deposited on silicon (100) by excimer laser |
| title_full_unstemmed |
Surface analysis of TiN thin film deposited on silicon (100) by excimer laser |
| title_sort |
surface analysis of tin thin film deposited on silicon (100) by excimer laser |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81771 |
| _version_ |
1821214829458751488 |