A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects

10.1109/JMEMS.2010.2076785

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Bibliographic Details
Main Authors:	Koh, K.H., Lee, C., Kobayashi, T.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Microelectromechanical systems (MEMS) mirror optical microelectromechanical systems piezoelectric actuator PZT variable optical attenuator
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81902
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81902
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spelling	sg-nus-scholar.10635-819022024-11-09T08:00:25Z A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects Koh, K.H. Lee, C. Kobayashi, T. ELECTRICAL & COMPUTER ENGINEERING Microelectromechanical systems (MEMS) mirror optical microelectromechanical systems piezoelectric actuator PZT variable optical attenuator 10.1109/JMEMS.2010.2076785 Journal of Microelectromechanical Systems 19 6 1370-1379 JMIYE 2014-10-07T04:23:02Z 2014-10-07T04:23:02Z 2010-12 Article Koh, K.H., Lee, C., Kobayashi, T. (2010-12). A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects. Journal of Microelectromechanical Systems 19 (6) : 1370-1379. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2010.2076785 10577157 http://scholarbank.nus.edu.sg/handle/10635/81902 000284875400011 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Microelectromechanical systems (MEMS) mirror optical microelectromechanical systems piezoelectric actuator PZT variable optical attenuator
spellingShingle	Microelectromechanical systems (MEMS) mirror optical microelectromechanical systems piezoelectric actuator PZT variable optical attenuator Koh, K.H. Lee, C. Kobayashi, T. A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
description	10.1109/JMEMS.2010.2076785
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Lee, C. Kobayashi, T.
format	Article
author	Koh, K.H. Lee, C. Kobayashi, T.
author_sort	Koh, K.H.
title	A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
title_short	A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
title_full	A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
title_fullStr	A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
title_full_unstemmed	A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
title_sort	piezoelectric-driven three-dimensional mems voa using attenuation mechanism with combination of rotational and translational effects
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81902
_version_	1821189190891601920

A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects

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