A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage

10.1109/JMEMS.2012.2196497

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Bibliographic Details
Main Authors:	Koh, K.H., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	CMOS compatible hybrid actuation microelectromechanical systems (MEMS) mirror optical MEMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81921
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81921
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spelling	sg-nus-scholar.10635-819212023-10-29T22:21:17Z A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage Koh, K.H. Lee, C. ELECTRICAL & COMPUTER ENGINEERING CMOS compatible hybrid actuation microelectromechanical systems (MEMS) mirror optical MEMS 10.1109/JMEMS.2012.2196497 Journal of Microelectromechanical Systems 21 5 1124-1135 JMIYE 2014-10-07T04:23:16Z 2014-10-07T04:23:16Z 2012 Article Koh, K.H., Lee, C. (2012). A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage. Journal of Microelectromechanical Systems 21 (5) : 1124-1135. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2012.2196497 10577157 http://scholarbank.nus.edu.sg/handle/10635/81921 000309731400016 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CMOS compatible hybrid actuation microelectromechanical systems (MEMS) mirror optical MEMS
spellingShingle	CMOS compatible hybrid actuation microelectromechanical systems (MEMS) mirror optical MEMS Koh, K.H. Lee, C. A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage
description	10.1109/JMEMS.2012.2196497
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Lee, C.
format	Article
author	Koh, K.H. Lee, C.
author_sort	Koh, K.H.
title	A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage
title_short	A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage
title_full	A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage
title_fullStr	A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage
title_full_unstemmed	A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage
title_sort	two-dimensional mems scanning mirror using hybrid actuation mechanisms with low operation voltage
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81921
_version_	1781784017084874752

A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage

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