Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums
10.1063/1.1372662
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2014
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sg-nus-scholar.10635-819752024-11-12T23:40:44Z Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums Liu, L. Wang, Y. Gong, H. ELECTRICAL & COMPUTER ENGINEERING MATERIALS SCIENCE 10.1063/1.1372662 Journal of Applied Physics 90 1 416-420 JAPIA 2014-10-07T04:23:54Z 2014-10-07T04:23:54Z 2001-07 Article Liu, L., Wang, Y., Gong, H. (2001-07). Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums. Journal of Applied Physics 90 (1) : 416-420. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1372662 00218979 http://scholarbank.nus.edu.sg/handle/10635/81975 000169361100063 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.1372662 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Liu, L. Wang, Y. Gong, H. |
| format |
Article |
| author |
Liu, L. Wang, Y. Gong, H. |
| spellingShingle |
Liu, L. Wang, Y. Gong, H. Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums |
| author_sort |
Liu, L. |
| title |
Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums |
| title_short |
Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums |
| title_full |
Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums |
| title_fullStr |
Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums |
| title_full_unstemmed |
Annealing effects of tantalum films on Si and SiO2/Si substrates in various vacuums |
| title_sort |
annealing effects of tantalum films on si and sio2/si substrates in various vacuums |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81975 |
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1821201105295507456 |