Effects of chemical and plasma surface treatments on the O2-annealed Ni/Au contact to p-Gan

Effects of chemical and plasma surface treatments on the O2-annealed Ni/Au contact to p-Gan

10.1016/j.tsf.2006.07.132

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Bibliographic Details
Main Authors: Lim, J., Chor, E.F., Tan, L.S.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
O2 anneal
Ohmic contact
p-GaN
Surface treatment
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82223
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82223

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