Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects
10.1063/1.4867044
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sg-nus-scholar.10635-823082024-11-09T08:00:04Z Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.4867044 Journal of Applied Physics 115 9 - JAPIA 2014-10-07T04:27:51Z 2014-10-07T04:27:51Z 2014 Article Wang, N., Hsiao, F.-L., Palaniapan, M., Lee, C. (2014). Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects. Journal of Applied Physics 115 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4867044 00218979 http://scholarbank.nus.edu.sg/handle/10635/82308 000332730700062 Scopus |
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| description |
10.1063/1.4867044 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C. |
| format |
Article |
| author |
Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C. |
| spellingShingle |
Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C. Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects |
| author_sort |
Wang, N. |
| title |
Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects |
| title_short |
Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects |
| title_full |
Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects |
| title_fullStr |
Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects |
| title_full_unstemmed |
Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects |
| title_sort |
evidence on simultaneous improvement of motional impedance and q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82308 |
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1821183492841537536 |