Nonlinear behavior of SOI free-free micromechanical beam resonator

Nonlinear behavior of SOI free-free micromechanical beam resonator

10.1016/j.sna.2007.08.016

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Bibliographic Details
Main Authors: Palaniapan, M., Khine, L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
MEMS
Micromechanical
Nonlinearity
Oscillator
Resonator
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82769
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Institution: National University of Singapore
Description
Summary:10.1016/j.sna.2007.08.016

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