Nonlinear behavior of SOI free-free micromechanical beam resonator

Nonlinear behavior of SOI free-free micromechanical beam resonator

10.1016/j.sna.2007.08.016

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Bibliographic Details
Main Authors: Palaniapan, M., Khine, L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
MEMS
Micromechanical
Nonlinearity
Oscillator
Resonator
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82769
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Institution: National University of Singapore
id sg-nus-scholar.10635-82769
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spelling sg-nus-scholar.10635-827692024-11-09T07:24:33Z Nonlinear behavior of SOI free-free micromechanical beam resonator Palaniapan, M. Khine, L. ELECTRICAL & COMPUTER ENGINEERING MEMS Micromechanical Nonlinearity Oscillator Resonator 10.1016/j.sna.2007.08.016 Sensors and Actuators, A: Physical 142 1 203-210 SAAPE 2014-10-07T04:33:17Z 2014-10-07T04:33:17Z 2008-03-10 Article Palaniapan, M., Khine, L. (2008-03-10). Nonlinear behavior of SOI free-free micromechanical beam resonator. Sensors and Actuators, A: Physical 142 (1) : 203-210. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2007.08.016 09244247 http://scholarbank.nus.edu.sg/handle/10635/82769 000253613100031 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic MEMS
Micromechanical
Nonlinearity
Oscillator
Resonator
spellingShingle MEMS
Micromechanical
Nonlinearity
Oscillator
Resonator
Palaniapan, M.
Khine, L.
Nonlinear behavior of SOI free-free micromechanical beam resonator
description 10.1016/j.sna.2007.08.016
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Palaniapan, M.
Khine, L.
format Article
author Palaniapan, M.
Khine, L.
author_sort Palaniapan, M.
title Nonlinear behavior of SOI free-free micromechanical beam resonator
title_short Nonlinear behavior of SOI free-free micromechanical beam resonator
title_full Nonlinear behavior of SOI free-free micromechanical beam resonator
title_fullStr Nonlinear behavior of SOI free-free micromechanical beam resonator
title_full_unstemmed Nonlinear behavior of SOI free-free micromechanical beam resonator
title_sort nonlinear behavior of soi free-free micromechanical beam resonator
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82769
_version_ 1821208999089930240

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