Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching

Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching

10.1021/nl802129f

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Bibliographic Details
Main Authors: Choi, W.K., Liew, T.H., Dawood, M.K., Smith, H.I., Thompson, C.V., Hong, M.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83142
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83142

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