A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional

10.1109/OMEMS.2011.6031040

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Bibliographic Details
Main Authors:	Koh, K.H., Kobayashi, T., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Mirror Optical Microelectromechanical Systems Piezoelectric Actuator
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83320
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83320
record_format	dspace
spelling	sg-nus-scholar.10635-833202024-11-09T08:00:53Z A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional Koh, K.H. Kobayashi, T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Mirror Optical Microelectromechanical Systems Piezoelectric Actuator 10.1109/OMEMS.2011.6031040 International Conference on Optical MEMS and Nanophotonics 41-42 2014-10-07T04:39:55Z 2014-10-07T04:39:55Z 2011 Conference Paper Koh, K.H.,Kobayashi, T.,Lee, C. (2011). A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional. International Conference on Optical MEMS and Nanophotonics : 41-42. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2011.6031040" target="_blank">https://doi.org/10.1109/OMEMS.2011.6031040</a> 9781457703362 21605033 http://scholarbank.nus.edu.sg/handle/10635/83320 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Mirror Optical Microelectromechanical Systems Piezoelectric Actuator
spellingShingle	Mirror Optical Microelectromechanical Systems Piezoelectric Actuator Koh, K.H. Kobayashi, T. Lee, C. A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional
description	10.1109/OMEMS.2011.6031040
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Lee, C.
format	Conference or Workshop Item
author	Koh, K.H. Kobayashi, T. Lee, C.
author_sort	Koh, K.H.
title	A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional
title_short	A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional
title_full	A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional
title_fullStr	A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional
title_full_unstemmed	A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional
title_sort	2-d raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - bending and torsional
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83320
_version_	1821214384247013376

A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional

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