Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry

Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry

10.1016/j.egypro.2011.06.112

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Bibliographic Details
Main Authors: Siah, S.C., Hoex, B., Aberle, A.G.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Ellipsometry
Rough surfaces
Silicon
Silicon nitride
Thin films
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83434
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Institution: National University of Singapore
id sg-nus-scholar.10635-83434
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spelling sg-nus-scholar.10635-834342023-10-25T22:40:02Z Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry Siah, S.C. Hoex, B. Aberle, A.G. SOLAR ENERGY RESEARCH INST OF S'PORE ELECTRICAL & COMPUTER ENGINEERING Ellipsometry Rough surfaces Silicon Silicon nitride Thin films 10.1016/j.egypro.2011.06.112 Energy Procedia 8 122-127 2014-10-07T04:41:12Z 2014-10-07T04:41:12Z 2011 Conference Paper Siah, S.C., Hoex, B., Aberle, A.G. (2011). Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry. Energy Procedia 8 : 122-127. ScholarBank@NUS Repository. https://doi.org/10.1016/j.egypro.2011.06.112 18766102 http://scholarbank.nus.edu.sg/handle/10635/83434 000298302000020 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Ellipsometry
Rough surfaces
Silicon
Silicon nitride
Thin films
spellingShingle Ellipsometry
Rough surfaces
Silicon
Silicon nitride
Thin films
Siah, S.C.
Hoex, B.
Aberle, A.G.
Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
description 10.1016/j.egypro.2011.06.112
author2 SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet SOLAR ENERGY RESEARCH INST OF S'PORE
Siah, S.C.
Hoex, B.
Aberle, A.G.
format Conference or Workshop Item
author Siah, S.C.
Hoex, B.
Aberle, A.G.
author_sort Siah, S.C.
title Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
title_short Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
title_full Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
title_fullStr Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
title_full_unstemmed Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
title_sort accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83434
_version_ 1781784357643485184

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