Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry

Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry

10.1016/j.egypro.2011.06.112

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Bibliographic Details
Main Authors: Siah, S.C., Hoex, B., Aberle, A.G.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Ellipsometry
Rough surfaces
Silicon
Silicon nitride
Thin films
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83434
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83434

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