Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates

10.1016/j.egypro.2012.07.005

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Main Authors: Yin, Y., Long, J., Venkataraj, S., Wang, J., Aberle, A.G.
其他作者: ELECTRICAL & COMPUTER ENGINEERING
格式: Conference or Workshop Item
出版: 2014
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在線閱讀:http://scholarbank.nus.edu.sg/handle/10635/83724
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spelling sg-nus-scholar.10635-837242024-11-12T21:35:10Z Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates Yin, Y. Long, J. Venkataraj, S. Wang, J. Aberle, A.G. ELECTRICAL & COMPUTER ENGINEERING Microcrystalline silicon PECVD Solar cells Thin film growth 10.1016/j.egypro.2012.07.005 Energy Procedia 25 34-42 2014-10-07T04:44:27Z 2014-10-07T04:44:27Z 2012 Conference Paper Yin, Y., Long, J., Venkataraj, S., Wang, J., Aberle, A.G. (2012). Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates. Energy Procedia 25 : 34-42. ScholarBank@NUS Repository. https://doi.org/10.1016/j.egypro.2012.07.005 18766102 http://scholarbank.nus.edu.sg/handle/10635/83724 000310699400005 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Microcrystalline silicon
PECVD
Solar cells
Thin film growth
spellingShingle Microcrystalline silicon
PECVD
Solar cells
Thin film growth
Yin, Y.
Long, J.
Venkataraj, S.
Wang, J.
Aberle, A.G.
Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates
description 10.1016/j.egypro.2012.07.005
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yin, Y.
Long, J.
Venkataraj, S.
Wang, J.
Aberle, A.G.
format Conference or Workshop Item
author Yin, Y.
Long, J.
Venkataraj, S.
Wang, J.
Aberle, A.G.
author_sort Yin, Y.
title Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates
title_short Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates
title_full Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates
title_fullStr Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates
title_full_unstemmed Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates
title_sort fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83724
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