Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates

Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates

10.1016/j.egypro.2012.07.005

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Bibliographic Details
Main Authors: Yin, Y., Long, J., Venkataraj, S., Wang, J., Aberle, A.G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Microcrystalline silicon
PECVD
Solar cells
Thin film growth
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83724
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Institution: National University of Singapore

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