Fabrication of high-quality boron-doped microcrystalline silicon thin films on several types of substrates

• Main Authors: Yin, Y., Long, J., Venkataraj, S., Wang, J., Aberle, A.G.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Microcrystalline silicon; PECVD; Solar cells; Thin film growth
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83724
• Institution: National University of Singapore

10.1016/j.egypro.2012.07.005