ICP etching and structure study of PECVD SiC films
International Journal of Modern Physics B
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2014
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sg-nus-scholar.10635-838102015-01-21T19:41:03Z ICP etching and structure study of PECVD SiC films Shi, J. Choi, W.K. Chor, E.F. ELECTRICAL & COMPUTER ENGINEERING International Journal of Modern Physics B 16 28-29 4318-4322 IJPBE 2014-10-07T04:45:26Z 2014-10-07T04:45:26Z 2002-11-20 Conference Paper Shi, J.,Choi, W.K.,Chor, E.F. (2002-11-20). ICP etching and structure study of PECVD SiC films. International Journal of Modern Physics B 16 (28-29) : 4318-4322. ScholarBank@NUS Repository. 02179792 http://scholarbank.nus.edu.sg/handle/10635/83810 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
International Journal of Modern Physics B |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Shi, J. Choi, W.K. Chor, E.F. |
| format |
Conference or Workshop Item |
| author |
Shi, J. Choi, W.K. Chor, E.F. |
| spellingShingle |
Shi, J. Choi, W.K. Chor, E.F. ICP etching and structure study of PECVD SiC films |
| author_sort |
Shi, J. |
| title |
ICP etching and structure study of PECVD SiC films |
| title_short |
ICP etching and structure study of PECVD SiC films |
| title_full |
ICP etching and structure study of PECVD SiC films |
| title_fullStr |
ICP etching and structure study of PECVD SiC films |
| title_full_unstemmed |
ICP etching and structure study of PECVD SiC films |
| title_sort |
icp etching and structure study of pecvd sic films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83810 |
| _version_ |
1681089504435240960 |