Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition
10.1117/12.456845
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2014
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sg-nus-scholar.10635-838422023-10-29T20:39:58Z Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition Whatt, G.Y. Lu, Y.F. Ren, Z.M. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING AFM Aluminium Nitride Laser Ablation Thin Films XPS XRD 10.1117/12.456845 Proceedings of SPIE - The International Society for Optical Engineering 4426 241-244 PSISD 2014-10-07T04:45:49Z 2014-10-07T04:45:49Z 2002 Conference Paper Whatt, G.Y., Lu, Y.F., Ren, Z.M., Chong, T.C. (2002). Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 241-244. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456845 0277786X http://scholarbank.nus.edu.sg/handle/10635/83842 000176422100053 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
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AFM Aluminium Nitride Laser Ablation Thin Films XPS XRD |
| spellingShingle |
AFM Aluminium Nitride Laser Ablation Thin Films XPS XRD Whatt, G.Y. Lu, Y.F. Ren, Z.M. Chong, T.C. Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition |
| description |
10.1117/12.456845 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Whatt, G.Y. Lu, Y.F. Ren, Z.M. Chong, T.C. |
| format |
Conference or Workshop Item |
| author |
Whatt, G.Y. Lu, Y.F. Ren, Z.M. Chong, T.C. |
| author_sort |
Whatt, G.Y. |
| title |
Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition |
| title_short |
Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition |
| title_full |
Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition |
| title_fullStr |
Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition |
| title_full_unstemmed |
Influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition |
| title_sort |
influence of laser fluence and laser repetition rate on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83842 |
| _version_ |
1781784395647025152 |