MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators

10.1109/PGC.2010.5705964

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Bibliographic Details
Main Authors:	Koh, K.H., Kobayashi, T., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83941
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83941
record_format	dspace
spelling	sg-nus-scholar.10635-839412015-01-07T03:39:11Z MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators Koh, K.H. Kobayashi, T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/PGC.2010.5705964 2010 Photonics Global Conference, PGC 2010 - 2014-10-07T04:46:58Z 2014-10-07T04:46:58Z 2010 Conference Paper Koh, K.H.,Kobayashi, T.,Lee, C. (2010). MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators. 2010 Photonics Global Conference, PGC 2010 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/PGC.2010.5705964" target="_blank">https://doi.org/10.1109/PGC.2010.5705964</a> 9781424498826 http://scholarbank.nus.edu.sg/handle/10635/83941 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/PGC.2010.5705964
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Lee, C.
format	Conference or Workshop Item
author	Koh, K.H. Kobayashi, T. Lee, C.
spellingShingle	Koh, K.H. Kobayashi, T. Lee, C. MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
author_sort	Koh, K.H.
title	MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
title_short	MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
title_full	MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
title_fullStr	MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
title_full_unstemmed	MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
title_sort	mems voa based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 pzt thin film actuators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83941
_version_	1681089528070144000

MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators

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