Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide

Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Bera, L.K., Choi, W.K., McNeill, D., Ray, S.K., Chatterjee, S., Maiti, C.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84239
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/84239

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