Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors:	Bera, L.K., Choi, W.K., McNeill, D., Ray, S.K., Chatterjee, S., Maiti, C.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84239
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-842392015-01-07T06:23:06Z Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide Bera, L.K. Choi, W.K. McNeill, D. Ray, S.K. Chatterjee, S. Maiti, C.K. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 640 H5.14.1-H5.14.6 MRSPD 2014-10-07T04:50:23Z 2014-10-07T04:50:23Z 2001 Conference Paper Bera, L.K.,Choi, W.K.,McNeill, D.,Ray, S.K.,Chatterjee, S.,Maiti, C.K. (2001). Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide. Materials Research Society Symposium - Proceedings 640 : H5.14.1-H5.14.6. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/84239 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Bera, L.K. Choi, W.K. McNeill, D. Ray, S.K. Chatterjee, S. Maiti, C.K.
format	Conference or Workshop Item
author	Bera, L.K. Choi, W.K. McNeill, D. Ray, S.K. Chatterjee, S. Maiti, C.K.
spellingShingle	Bera, L.K. Choi, W.K. McNeill, D. Ray, S.K. Chatterjee, S. Maiti, C.K. Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide
author_sort	Bera, L.K.
title	Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide
title_short	Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide
title_full	Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide
title_fullStr	Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide
title_full_unstemmed	Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide
title_sort	structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84239
_version_	1681089582082293760

Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide

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