Suppressed leakage in low temperature RTA (700°C 30S) junctions with buried epitaxial Si 1-yC y

Proceedings - Electrochemical Society

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Bibliographic Details
Main Authors: Tan, C.F., Lee, H., Liu, J.P., Quek, E., Chan, L., Chor, E.F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84261
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Institution: National University of Singapore
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Summary:Proceedings - Electrochemical Society