Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application
10.1109/OMEMS.2010.5672154
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2014
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sg-nus-scholar.10635-843102015-01-08T00:30:59Z Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application Koh, K.H. Kobayashi, T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/OMEMS.2010.5672154 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 119-120 2014-10-07T04:51:12Z 2014-10-07T04:51:12Z 2010 Conference Paper Koh, K.H.,Kobayashi, T.,Lee, C. (2010). Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 : 119-120. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2010.5672154" target="_blank">https://doi.org/10.1109/OMEMS.2010.5672154</a> 9781424489251 http://scholarbank.nus.edu.sg/handle/10635/84310 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
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NUS Library |
| country |
Singapore |
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ScholarBank@NUS |
| description |
10.1109/OMEMS.2010.5672154 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Lee, C. |
| format |
Conference or Workshop Item |
| author |
Koh, K.H. Kobayashi, T. Lee, C. |
| spellingShingle |
Koh, K.H. Kobayashi, T. Lee, C. Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application |
| author_sort |
Koh, K.H. |
| title |
Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application |
| title_short |
Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application |
| title_full |
Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application |
| title_fullStr |
Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application |
| title_full_unstemmed |
Torsional mirror driven by a cantilever beam integrated with 1x10 individually biased PZT array actuator for VOA application |
| title_sort |
torsional mirror driven by a cantilever beam integrated with 1x10 individually biased pzt array actuator for voa application |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84310 |
| _version_ |
1681089595053178880 |