A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices
10.1007/s11249-013-0112-3
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sg-nus-scholar.10635-848332023-10-30T21:42:28Z A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices Leong, J.Y. Satyanarayana, N. Sinha, S.K. MECHANICAL ENGINEERING Boundary lubrication Friction MEMS devices 10.1007/s11249-013-0112-3 Tribology Letters 50 2 195-206 2014-10-07T09:00:49Z 2014-10-07T09:00:49Z 2013-05 Article Leong, J.Y., Satyanarayana, N., Sinha, S.K. (2013-05). A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices. Tribology Letters 50 (2) : 195-206. ScholarBank@NUS Repository. https://doi.org/10.1007/s11249-013-0112-3 10238883 http://scholarbank.nus.edu.sg/handle/10635/84833 000318004600008 Scopus |
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Boundary lubrication Friction MEMS devices |
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Boundary lubrication Friction MEMS devices Leong, J.Y. Satyanarayana, N. Sinha, S.K. A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices |
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10.1007/s11249-013-0112-3 |
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MECHANICAL ENGINEERING |
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MECHANICAL ENGINEERING Leong, J.Y. Satyanarayana, N. Sinha, S.K. |
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Article |
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Leong, J.Y. Satyanarayana, N. Sinha, S.K. |
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Leong, J.Y. |
title |
A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices |
title_short |
A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices |
title_full |
A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices |
title_fullStr |
A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices |
title_full_unstemmed |
A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices |
title_sort |
tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to si-mems devices |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/84833 |
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