A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices

A tribological study of multiply-alkylated cyclopentanes and perfluoropolyether lubricants for application to Si-MEMS devices

10.1007/s11249-013-0112-3

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Bibliographic Details
Main Authors: Leong, J.Y., Satyanarayana, N., Sinha, S.K.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Boundary lubrication
Friction
MEMS devices
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84833
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Institution: National University of Singapore
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