A universal scheme for patterning of oxides via thermal nanoimprint lithography

10.1002/adfm.201202577

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Bibliographic Details
Main Authors:	Dinachali, S.S., Saifullah, M.S.M., Ganesan, R., Thian, E.S., He, C.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	2014
Subjects:	alkoxides nanoimprint lithography oxides patterning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84835
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-848352023-10-30T21:42:31Z A universal scheme for patterning of oxides via thermal nanoimprint lithography Dinachali, S.S. Saifullah, M.S.M. Ganesan, R. Thian, E.S. He, C. MATERIALS SCIENCE AND ENGINEERING MECHANICAL ENGINEERING alkoxides nanoimprint lithography oxides patterning 10.1002/adfm.201202577 Advanced Functional Materials 23 17 2201-2211 AFMDC 2014-10-07T09:00:50Z 2014-10-07T09:00:50Z 2013-05-06 Article Dinachali, S.S., Saifullah, M.S.M., Ganesan, R., Thian, E.S., He, C. (2013-05-06). A universal scheme for patterning of oxides via thermal nanoimprint lithography. Advanced Functional Materials 23 (17) : 2201-2211. ScholarBank@NUS Repository. https://doi.org/10.1002/adfm.201202577 1616301X http://scholarbank.nus.edu.sg/handle/10635/84835 000318315800014 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	alkoxides nanoimprint lithography oxides patterning
spellingShingle	alkoxides nanoimprint lithography oxides patterning Dinachali, S.S. Saifullah, M.S.M. Ganesan, R. Thian, E.S. He, C. A universal scheme for patterning of oxides via thermal nanoimprint lithography
description	10.1002/adfm.201202577
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Dinachali, S.S. Saifullah, M.S.M. Ganesan, R. Thian, E.S. He, C.
format	Article
author	Dinachali, S.S. Saifullah, M.S.M. Ganesan, R. Thian, E.S. He, C.
author_sort	Dinachali, S.S.
title	A universal scheme for patterning of oxides via thermal nanoimprint lithography
title_short	A universal scheme for patterning of oxides via thermal nanoimprint lithography
title_full	A universal scheme for patterning of oxides via thermal nanoimprint lithography
title_fullStr	A universal scheme for patterning of oxides via thermal nanoimprint lithography
title_full_unstemmed	A universal scheme for patterning of oxides via thermal nanoimprint lithography
title_sort	universal scheme for patterning of oxides via thermal nanoimprint lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84835
_version_	1781784518677495808

A universal scheme for patterning of oxides via thermal nanoimprint lithography

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