A universal scheme for patterning of oxides via thermal nanoimprint lithography
10.1002/adfm.201202577
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Main Authors: | Dinachali, S.S., Saifullah, M.S.M., Ganesan, R., Thian, E.S., He, C. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/84835 |
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Institution: | National University of Singapore |
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