Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting

• Main Authors: Ge, Junyu, Ding, Bin, Hou, Shuai, Luo, Manlin, Nam, Donguk, Duan, Hongwei, Gao, Huajian, Lam, Yee Cheong, Li, Hong
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Mechanical engineering::Prototyping; Ultrasonic Embossing; Metal Nanoimprinting; Plasmonic Structure; Biosensing
• Online Access: https://hdl.handle.net/10356/153146
• Institution: Nanyang Technological University

Despite its advantages of scalable process and cost-effectiveness, nanoimprinting faces challenges with imprinting hard materials (e.g., crystalline metals) at low/room temperatures, and with fabricating complex nanostructures rapidly (e.g., heterojunctions of metal and oxide). Herein, we report a r...