Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting

• Main Authors: Ge, Junyu, Ding, Bin, Hou, Shuai, Luo, Manlin, Nam, Donguk, Duan, Hongwei, Gao, Huajian, Lam, Yee Cheong, Li, Hong
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2021
• 主題: Engineering::Mechanical engineering::Prototyping; Ultrasonic Embossing; Metal Nanoimprinting; Plasmonic Structure; Biosensing
• 在線閱讀: https://hdl.handle.net/10356/153146
• 機構: Nanyang Technological University

Despite its advantages of scalable process and cost-effectiveness, nanoimprinting faces challenges with imprinting hard materials (e.g., crystalline metals) at low/room temperatures, and with fabricating complex nanostructures rapidly (e.g., heterojunctions of metal and oxide). Herein, we report a r...