Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition

Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition

10.1243/09544054JEM432SC

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Bibliographic Details
Main Authors: Thian, S., Tang, Y., Fuh, J.Y.H., Wong, Y.S., Loh, H.T., Lu, L., Tee, D.Z.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Microcavity
Microinjection moulding
Micromould
Nickel electrodeposition
SU8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85226
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Institution: National University of Singapore
id sg-nus-scholar.10635-85226
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spelling sg-nus-scholar.10635-852262023-10-25T23:39:38Z Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition Thian, S. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Loh, H.T. Lu, L. Tee, D.Z.S. MECHANICAL ENGINEERING Microcavity Microinjection moulding Micromould Nickel electrodeposition SU8 10.1243/09544054JEM432SC Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 220 2 329-333 PIBME 2014-10-07T09:05:31Z 2014-10-07T09:05:31Z 2006 Article Thian, S., Tang, Y., Fuh, J.Y.H., Wong, Y.S., Loh, H.T., Lu, L., Tee, D.Z.S. (2006). Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 220 (2) : 329-333. ScholarBank@NUS Repository. https://doi.org/10.1243/09544054JEM432SC 09544054 http://scholarbank.nus.edu.sg/handle/10635/85226 000238325600020 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Microcavity
Microinjection moulding
Micromould
Nickel electrodeposition
SU8
spellingShingle Microcavity
Microinjection moulding
Micromould
Nickel electrodeposition
SU8
Thian, S.
Tang, Y.
Fuh, J.Y.H.
Wong, Y.S.
Loh, H.T.
Lu, L.
Tee, D.Z.S.
Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition
description 10.1243/09544054JEM432SC
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Thian, S.
Tang, Y.
Fuh, J.Y.H.
Wong, Y.S.
Loh, H.T.
Lu, L.
Tee, D.Z.S.
format Article
author Thian, S.
Tang, Y.
Fuh, J.Y.H.
Wong, Y.S.
Loh, H.T.
Lu, L.
Tee, D.Z.S.
author_sort Thian, S.
title Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition
title_short Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition
title_full Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition
title_fullStr Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition
title_full_unstemmed Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition
title_sort formation of micromoulds via uv lithography of su8 photoresist and nickel electrodeposition
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85226
_version_ 1781784621381320704

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