Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition

10.1243/09544054JEM432SC

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Bibliographic Details
Main Authors: Thian, S., Tang, Y., Fuh, J.Y.H., Wong, Y.S., Loh, H.T., Lu, L., Tee, D.Z.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
SU8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85226
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Institution: National University of Singapore

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