Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)

10.1016/j.sna.2005.06.027

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Main Authors: Zhu, T.J., Lu, L., Lai, M.O.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/85251
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spelling sg-nus-scholar.10635-852512023-10-30T10:14:55Z Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0) Zhu, T.J. Lu, L. Lai, M.O. MECHANICAL ENGINEERING Buffer layers Ferroelectric properties Ferroelectric thin films Orientation Pulsed laser deposition 10.1016/j.sna.2005.06.027 Sensors and Actuators, A: Physical 125 2 335-339 SAAPE 2014-10-07T09:05:49Z 2014-10-07T09:05:49Z 2006-01-10 Article Zhu, T.J., Lu, L., Lai, M.O. (2006-01-10). Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0). Sensors and Actuators, A: Physical 125 (2) : 335-339. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2005.06.027 09244247 http://scholarbank.nus.edu.sg/handle/10635/85251 000234535400030 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Buffer layers
Ferroelectric properties
Ferroelectric thin films
Orientation
Pulsed laser deposition
spellingShingle Buffer layers
Ferroelectric properties
Ferroelectric thin films
Orientation
Pulsed laser deposition
Zhu, T.J.
Lu, L.
Lai, M.O.
Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)
description 10.1016/j.sna.2005.06.027
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Zhu, T.J.
Lu, L.
Lai, M.O.
format Article
author Zhu, T.J.
Lu, L.
Lai, M.O.
author_sort Zhu, T.J.
title Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)
title_short Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)
title_full Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)
title_fullStr Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)
title_full_unstemmed Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)
title_sort growth and electrical properties of highly (0 0 1)-oriented pb(zr 0.52ti0.48)o3 thin films on amorphous tin buffered si(1 0 0)
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85251
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