Growth and electrical properties of highly (0 0 1)-oriented Pb(Zr 0.52Ti0.48)O3 thin films on amorphous TiN buffered Si(1 0 0)

10.1016/j.sna.2005.06.027

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Bibliographic Details
Main Authors: Zhu, T.J., Lu, L., Lai, M.O.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85251
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Institution: National University of Singapore

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