Large Area, Facile Oxide Nanofabrication via Step-and-Flash Imprint Lithography of Metal-Organic Hybrid Resins

Large Area, Facile Oxide Nanofabrication via Step-and-Flash Imprint Lithography of Metal-Organic Hybrid Resins

10.1021/am404136p

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Bibliographic Details
Main Authors: Dinachali, S.S., Dumond, J., Saifullah, M.S.M., Ansah-Antwi, K.K., Ganesan, R., Thian, E.S., He, C.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Published: 2014
Subjects:
Metal oxides
Metal-organic resins
Nanofabrication
Nanolithography
Step-and-flash nanoimprint lithography
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85344
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Institution: National University of Singapore
Description
Summary:10.1021/am404136p

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