Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique

Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique

10.1016/j.jallcom.2006.02.109

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Bibliographic Details
Main Authors: Yu, Y.H., Lai, M.O., Lu, L., Yang, P.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Laser processing
PZT
Residual stresses
Synchrotron radiation
Thin film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85378
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Institution: National University of Singapore
Description
Summary:10.1016/j.jallcom.2006.02.109

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