Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique

Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique

10.1016/j.jallcom.2006.02.109

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Bibliographic Details
Main Authors: Yu, Y.H., Lai, M.O., Lu, L., Yang, P.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Laser processing
PZT
Residual stresses
Synchrotron radiation
Thin film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85378
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-853782024-11-13T08:37:45Z Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique Yu, Y.H. Lai, M.O. Lu, L. Yang, P. MECHANICAL ENGINEERING SINGAPORE SYNCHROTRON LIGHT SOURCE Laser processing PZT Residual stresses Synchrotron radiation Thin film 10.1016/j.jallcom.2006.02.109 Journal of Alloys and Compounds 449 1-2 56-59 JALCE 2014-10-07T09:07:19Z 2014-10-07T09:07:19Z 2008-01-31 Article Yu, Y.H., Lai, M.O., Lu, L., Yang, P. (2008-01-31). Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique. Journal of Alloys and Compounds 449 (1-2) : 56-59. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jallcom.2006.02.109 09258388 http://scholarbank.nus.edu.sg/handle/10635/85378 000252737500015 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Laser processing
PZT
Residual stresses
Synchrotron radiation
Thin film
spellingShingle Laser processing
PZT
Residual stresses
Synchrotron radiation
Thin film
Yu, Y.H.
Lai, M.O.
Lu, L.
Yang, P.
Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique
description 10.1016/j.jallcom.2006.02.109
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Yu, Y.H.
Lai, M.O.
Lu, L.
Yang, P.
format Article
author Yu, Y.H.
Lai, M.O.
Lu, L.
Yang, P.
author_sort Yu, Y.H.
title Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique
title_short Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique
title_full Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique
title_fullStr Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique
title_full_unstemmed Measurement of residual stress of PZT thin film on Si(1 0 0) by synchrotron X-ray rocking curve technique
title_sort measurement of residual stress of pzt thin film on si(1 0 0) by synchrotron x-ray rocking curve technique
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85378
_version_ 1821218041158959104

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