Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model

Optik (Jena)

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Bibliographic Details
Main Authors:	Tay, C.J., Wang, S.H., Quan, C., Ng, C.K.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85710
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-85710
record_format	dspace
spelling	sg-nus-scholar.10635-857102015-01-25T19:53:26Z Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model Tay, C.J. Wang, S.H. Quan, C. Ng, C.K. MECHANICAL ENGINEERING Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS) Optik (Jena) 113 7 317-321 OTIKA 2014-10-07T09:11:14Z 2014-10-07T09:11:14Z 2002 Article Tay, C.J.,Wang, S.H.,Quan, C.,Ng, C.K. (2002). Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model. Optik (Jena) 113 (7) : 317-321. ScholarBank@NUS Repository. 00304026 http://scholarbank.nus.edu.sg/handle/10635/85710 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS)
spellingShingle	Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS) Tay, C.J. Wang, S.H. Quan, C. Ng, C.K. Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model
description	Optik (Jena)
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, C.J. Wang, S.H. Quan, C. Ng, C.K.
format	Article
author	Tay, C.J. Wang, S.H. Quan, C. Ng, C.K.
author_sort	Tay, C.J.
title	Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model
title_short	Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model
title_full	Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model
title_fullStr	Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model
title_full_unstemmed	Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model
title_sort	surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85710
_version_	1681089850418135040

Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model

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