All-solid-state thin film microbatteries fabricated by rf sputtering

All-solid-state thin film microbatteries fabricated by rf sputtering

10.1117/12.886251

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Bibliographic Details
Main Authors: Feng, J.K., Lai, M.O., Zeng, X., Huang, Z., Lu, L.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Anode
Cathode
Lithium battery
Oxide
Sputtering
Thin film battery
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85873
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Institution: National University of Singapore
id sg-nus-scholar.10635-85873
record_format dspace
spelling sg-nus-scholar.10635-858732023-10-26T09:05:08Z All-solid-state thin film microbatteries fabricated by rf sputtering Feng, J.K. Lai, M.O. Zeng, X. Huang, Z. Lu, L. MECHANICAL ENGINEERING Anode Cathode Lithium battery Oxide Sputtering Thin film battery 10.1117/12.886251 Proceedings of SPIE - The International Society for Optical Engineering 8035 - PSISD 2014-10-07T09:13:13Z 2014-10-07T09:13:13Z 2011 Conference Paper Feng, J.K., Lai, M.O., Zeng, X., Huang, Z., Lu, L. (2011). All-solid-state thin film microbatteries fabricated by rf sputtering. Proceedings of SPIE - The International Society for Optical Engineering 8035 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.886251 9780819486097 0277786X http://scholarbank.nus.edu.sg/handle/10635/85873 000294155700009 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Anode
Cathode
Lithium battery
Oxide
Sputtering
Thin film battery
spellingShingle Anode
Cathode
Lithium battery
Oxide
Sputtering
Thin film battery
Feng, J.K.
Lai, M.O.
Zeng, X.
Huang, Z.
Lu, L.
All-solid-state thin film microbatteries fabricated by rf sputtering
description 10.1117/12.886251
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Feng, J.K.
Lai, M.O.
Zeng, X.
Huang, Z.
Lu, L.
format Conference or Workshop Item
author Feng, J.K.
Lai, M.O.
Zeng, X.
Huang, Z.
Lu, L.
author_sort Feng, J.K.
title All-solid-state thin film microbatteries fabricated by rf sputtering
title_short All-solid-state thin film microbatteries fabricated by rf sputtering
title_full All-solid-state thin film microbatteries fabricated by rf sputtering
title_fullStr All-solid-state thin film microbatteries fabricated by rf sputtering
title_full_unstemmed All-solid-state thin film microbatteries fabricated by rf sputtering
title_sort all-solid-state thin film microbatteries fabricated by rf sputtering
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85873
_version_ 1781784777364340736

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