Power MEMS: An important category of MEMS
Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications
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2014
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sg-nus-scholar.10635-861322015-02-12T00:07:28Z Power MEMS: An important category of MEMS Chou, S.K. Zhang, K. Yang, W. Li, J. Li, Z. SINGAPORE SYNCHROTRON LIGHT SOURCE MECHANICAL ENGINEERING Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications 127-164 2014-10-07T09:16:12Z 2014-10-07T09:16:12Z 2011-01 Others Chou, S.K.,Zhang, K.,Yang, W.,Li, J.,Li, Z. (2011-01). Power MEMS: An important category of MEMS. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications : 127-164. ScholarBank@NUS Repository. 9781608764747 http://scholarbank.nus.edu.sg/handle/10635/86132 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications |
| author2 |
SINGAPORE SYNCHROTRON LIGHT SOURCE |
| author_facet |
SINGAPORE SYNCHROTRON LIGHT SOURCE Chou, S.K. Zhang, K. Yang, W. Li, J. Li, Z. |
| format |
Others |
| author |
Chou, S.K. Zhang, K. Yang, W. Li, J. Li, Z. |
| spellingShingle |
Chou, S.K. Zhang, K. Yang, W. Li, J. Li, Z. Power MEMS: An important category of MEMS |
| author_sort |
Chou, S.K. |
| title |
Power MEMS: An important category of MEMS |
| title_short |
Power MEMS: An important category of MEMS |
| title_full |
Power MEMS: An important category of MEMS |
| title_fullStr |
Power MEMS: An important category of MEMS |
| title_full_unstemmed |
Power MEMS: An important category of MEMS |
| title_sort |
power mems: an important category of mems |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/86132 |
| _version_ |
1681089927470645248 |