Power MEMS: An important category of MEMS

• Main Authors: Chou, S.K., Zhang, K., Yang, W., Li, J., Li, Z.
• Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
• Format: Others
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/86132
• Institution: National University of Singapore

Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications