Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices

Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices

10.1109/JSEN.2008.918986

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Bibliographic Details
Main Authors: Teo, E.H.T., Chua, D.H.C., Lim, L.T.W., O'Shea, S., Miao, J.M., Tay, B.K.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Published: 2014
Subjects:
Amorphous carbon film
Frequency response
Microcantilever
Microelectromechanical systems
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86316
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/86316

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