Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices

10.1109/JSEN.2008.918986

Saved in:

Bibliographic Details
Main Authors:	Teo, E.H.T., Chua, D.H.C., Lim, L.T.W., O'Shea, S., Miao, J.M., Tay, B.K.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	2014
Subjects:	Amorphous carbon film Frequency response Microcantilever Microelectromechanical systems
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86316
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-86316
record_format	dspace
spelling	sg-nus-scholar.10635-863162023-10-30T08:06:41Z Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices Teo, E.H.T. Chua, D.H.C. Lim, L.T.W. O'Shea, S. Miao, J.M. Tay, B.K. MATERIALS SCIENCE AND ENGINEERING Amorphous carbon film Frequency response Microcantilever Microelectromechanical systems 10.1109/JSEN.2008.918986 IEEE Sensors Journal 8 5 616-620 2014-10-07T09:49:16Z 2014-10-07T09:49:16Z 2008-05 Article Teo, E.H.T., Chua, D.H.C., Lim, L.T.W., O'Shea, S., Miao, J.M., Tay, B.K. (2008-05). Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices. IEEE Sensors Journal 8 (5) : 616-620. ScholarBank@NUS Repository. https://doi.org/10.1109/JSEN.2008.918986 1530437X http://scholarbank.nus.edu.sg/handle/10635/86316 000258763200028 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Amorphous carbon film Frequency response Microcantilever Microelectromechanical systems
spellingShingle	Amorphous carbon film Frequency response Microcantilever Microelectromechanical systems Teo, E.H.T. Chua, D.H.C. Lim, L.T.W. O'Shea, S. Miao, J.M. Tay, B.K. Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices
description	10.1109/JSEN.2008.918986
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Teo, E.H.T. Chua, D.H.C. Lim, L.T.W. O'Shea, S. Miao, J.M. Tay, B.K.
format	Article
author	Teo, E.H.T. Chua, D.H.C. Lim, L.T.W. O'Shea, S. Miao, J.M. Tay, B.K.
author_sort	Teo, E.H.T.
title	Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices
title_short	Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices
title_full	Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices
title_fullStr	Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices
title_full_unstemmed	Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices
title_sort	fabrication and characterization of multilayer amorphous carbon films for microcantilever devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86316
_version_	1781784855302897664

Fabrication and characterization of multilayer amorphous carbon films for microcantilever devices

Similar Items