Vapor pressure and voiding effects on thin film damage

Thin Solid Films

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Bibliographic Details
Main Authors:	Chew, H.B., Guo, T.F., Cheng, L.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Discrete voids Thin film Vapor pressure Void shape
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86973
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-86973
record_format	dspace
spelling	sg-nus-scholar.10635-869732018-12-18T23:41:20Z Vapor pressure and voiding effects on thin film damage Chew, H.B. Guo, T.F. Cheng, L. MATERIALS SCIENCE AND ENGINEERING MECHANICAL ENGINEERING Discrete voids Thin film Vapor pressure Void shape Thin Solid Films 504 1-2 325-330 THSFA 2014-10-07T09:57:01Z 2014-10-07T09:57:01Z 2006-05-10 Conference Paper Chew, H.B., Guo, T.F., Cheng, L. (2006-05-10). Vapor pressure and voiding effects on thin film damage. Thin Solid Films 504 (1-2) : 325-330. ScholarBank@NUS Repository. 00406090 http://scholarbank.nus.edu.sg/handle/10635/86973 000236486200076 Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Discrete voids Thin film Vapor pressure Void shape
spellingShingle	Discrete voids Thin film Vapor pressure Void shape Chew, H.B. Guo, T.F. Cheng, L. Vapor pressure and voiding effects on thin film damage
description	Thin Solid Films
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Chew, H.B. Guo, T.F. Cheng, L.
format	Conference or Workshop Item
author	Chew, H.B. Guo, T.F. Cheng, L.
author_sort	Chew, H.B.
title	Vapor pressure and voiding effects on thin film damage
title_short	Vapor pressure and voiding effects on thin film damage
title_full	Vapor pressure and voiding effects on thin film damage
title_fullStr	Vapor pressure and voiding effects on thin film damage
title_full_unstemmed	Vapor pressure and voiding effects on thin film damage
title_sort	vapor pressure and voiding effects on thin film damage
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86973
_version_	1681090079453347840

Vapor pressure and voiding effects on thin film damage

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