Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication
Applied Optics
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/91053 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-91053 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-910532023-06-04T07:13:35Z Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. ELECTRICAL & COMPUTER ENGINEERING CIVIL & ENVIRONMENTAL ENGINEERING Applied Optics 50 35 6536-6542 APOPA 2014-10-09T07:37:31Z 2014-10-09T07:37:31Z 2011-12-10 Article Tang, M., Chen, Z.C., Huang, Z.Q., Choo, Y.S., Hong, M.H. (2011-12-10). Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication. Applied Optics 50 (35) : 6536-6542. ScholarBank@NUS Repository. 1559128X http://scholarbank.nus.edu.sg/handle/10635/91053 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Applied Optics |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. |
| format |
Article |
| author |
Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. |
| spellingShingle |
Tang, M. Chen, Z.C. Huang, Z.Q. Choo, Y.S. Hong, M.H. Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| author_sort |
Tang, M. |
| title |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_short |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_full |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_fullStr |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_full_unstemmed |
Maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| title_sort |
maskless multiple-beam laser lithography for largearea nanostructure/ microstructure fabrication |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/91053 |
| _version_ |
1769839185783422976 |