Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

10.1116/1.1513640

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Bibliographic Details
Main Authors:	Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/92241
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-922412023-10-26T08:22:55Z Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G. CHEMICAL & ENVIRONMENTAL ENGINEERING 10.1116/1.1513640 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 20 6 1955-1963 JVTAD 2014-10-09T09:58:45Z 2014-10-09T09:58:45Z 2002-11 Article Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G. (2002-11). Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 20 (6) : 1955-1963. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1513640 07342101 http://scholarbank.nus.edu.sg/handle/10635/92241 000179441700020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.1513640
author2	CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet	CHEMICAL & ENVIRONMENTAL ENGINEERING Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G.
format	Article
author	Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G.
spellingShingle	Yang, G.H. Oh, S.W. Kang, E.T. Neoh, K.G. Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
author_sort	Yang, G.H.
title	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_short	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_full	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_fullStr	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_full_unstemmed	Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
title_sort	plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/92241
_version_	1781785760009027584

Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

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