Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge
10.1016/S0009-2614(02)01793-1
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2014
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sg-nus-scholar.10635-932692023-10-30T21:16:37Z Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge Li, P. Fan, W.Y. CHEMISTRY 10.1016/S0009-2614(02)01793-1 Chemical Physics Letters 367 5-6 645-650 CHPLB 2014-10-16T08:22:20Z 2014-10-16T08:22:20Z 2003-01-10 Article Li, P., Fan, W.Y. (2003-01-10). Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge. Chemical Physics Letters 367 (5-6) : 645-650. ScholarBank@NUS Repository. https://doi.org/10.1016/S0009-2614(02)01793-1 00092614 http://scholarbank.nus.edu.sg/handle/10635/93269 000180359100021 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1016/S0009-2614(02)01793-1 |
| author2 |
CHEMISTRY |
| author_facet |
CHEMISTRY Li, P. Fan, W.Y. |
| format |
Article |
| author |
Li, P. Fan, W.Y. |
| spellingShingle |
Li, P. Fan, W.Y. Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge |
| author_sort |
Li, P. |
| title |
Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge |
| title_short |
Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge |
| title_full |
Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge |
| title_fullStr |
Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge |
| title_full_unstemmed |
Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge |
| title_sort |
characterization of sin and other transient species in a silicon tetrachloride-nitrogen discharge |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/93269 |
| _version_ |
1781785892220829696 |