$The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell$

The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

10.1109/JPHOTOV.2014.2298097

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Bibliographic Details
Main Authors:	Xu, L., Weber, K., Fell, A., Hameiri, Z., Phang, S.P., Yang, X., Franklin, E.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Article
Published:	2016
Subjects:	Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/128753
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Institution:	National University of Singapore

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